SEMulator3D FinFET Process Model

3D ModelNoAI

Using a semiconductor process simulation developed by Coventor, this 3D model illustrates a small section of a FinFET device at high resolution. The graphic displays a portion of the structure that is approximately 600 nm on each edge (roughly the wavelength of orange light). Each of the 17 colors represents a different material in the manufacturing process.

The model is fully integrated, highly predictive and extremely accurate, displaying all processes from starting wafer through FEOL to the back end metal layers. It highlights the advanced virtual wafer fabrication capabilities of SEMulator3D, including MultiEtch, Visibility-Limited Deposition, Selective Epitaxy and other semiconductor fabrication processes.

Credit: Peter Fried, ARC-3D and the NYU Department of Applied Physics